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CMP

MAXIMIZED PERFORMANCE

Data Storage CMP Filtration That Improves Process Capability And Reduces Microscratches.

Our CMP filters are designed to maximize process performance by controlling the shape, size, and concentration of slurry particles leading to higher yields and fewer defects. By implementing our industry leading filter designs, slurry particle size, shape, and density of Large Particle Counts (LPCs) can be controlled to specified process parameters.

 

Effective filtering leads to a reduction in defects and process excursions that can reduce micro scratches. Our experts will work to maximize a site’s filtering schemes to increase slurry life and extend the life of slurry distribution systems via proper implementation. Our CMP filters have continuously profiled pore structure for built-in prefiltration and long service life.

 

Applications:

Slurry filters are normally situated in two locations in a hard disk polishing system: in the slurry recirculation loop and at the point-of-use (POU) where a capsule filter is installed closer to the polish tool. Pall Corporation offers a variety of media and configurations for both bulk and POU applications to enable substrate/media producers to meet ultra-smooth wafer requirements. Pall’s filters can be customized for different working pressures as well as slurry chemistries. By implementing Pall’s CMP filtering systems, process stability can be achieved.

 

Benefits:

  • Enhanced process control and stability
  • Increased area/process efficiency
  • Extended slurry life
  • Reduced Microscratches

 

Our CMP Filters improve any CMP process by eliminating contaminants and controlling slurry size, shape, and chemistry. Contact Pall expert show you how to optimize your CMP slurry filtration to maximize process performance.

Contact our team of filtration experts for more information on improving the efficiency of your process.

 

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Let’s connect. We want to share our innovative filtration solutions with you today. Contact our knowledgeable subject matter experts for information on how we can help. Thank you and we look forward to assisting you shortly.

Choose Industry
  • Corporate
  • Aerospace
  • Biotech
  • Chemicals & Polymers
  • Food & Beverage
  • Industrial Manufacturing
  • Laboratory
  • Medical
  • Microelectronics
  • Oil & Gas
  • Power & Utilities
Choose Support Type
  • General Inquiry
  • Pricing / Quotation
  • Technical Help
Would you like to receive more information about Pall’s products and services, and related products and services from Pall’s related companies?

By clicking the Submit button below and proceeding I confirm that I have reviewed and agree with the Terms of Use and the Privacy Policy.

Thank You

We will get in touch with you very shortly.